The VEGA3 is a high-performance analytical SEM capable of operating in both high-vacuum and low-vacuum modes.

It has a LaB6 filament with best resolution of 2 nm at 30 kV in high-vacuum mode and 2.5 nm at 30 kV in low-vacuum mode. It has excellent SE and BSE imaging capabilities. In addition, it is equipped with a panchromatic CL detector with 185-850 nm wavelength range, a low-vacuum SE detector, transmitted electron detector and IR TV camera for Chamber viewing.

The VEGA3 is equipped with an Oxford Instruments X-Max 50 silicon drift EDS system with AZtec and INCA software. It is capable of analysis for elements in the range Be to Pu. Capable of processing X-Ray count rates in excess of 500,000 cps, it can also rapidly generate X-ray element distribution maps and line profiles. AZtec TruMap and TruLine software applies background and overlap corrections to map and line data to provide artefact-free element distribution images. QuantMap software in the INCA package can provide quantitative mapping data. INCA Feature is also available for automatic feature detection, analysis and classification.

This instrument is best suited to imaging and analysis of coated samples that are stable under the electron beam, e.g. rocks, minerals, ceramics, metals and alloys, but can also image uncoated samples in low-vacuum mode.


  • High-vacuum and variable-pressure secondary electron imaging
  • Backscattered electron imaging
  • Cathodoluminescence imaging
  • Transmitted electron imaging
  • Qualitative EDS X-ray microanalysis
  • Quantitative EDS X-ray microanalysis
  • Qualitative, artefact-free X-ray element mapping
  • Quantitative X-ray element mapping

Instrument specifications

  • LaB6 filament
  • Accelerating voltage: 200 V-30 kV
  • Best resolution: 2 nm at 30 kV (High vacuum); 2.5 nm at 30 kV (Low vacuum)
  • 185-850 nm panchromatic CL detector
  • High count rate silicon drift EDS system